Anomalous Auger electron spectroscopy results of chemical vapor deposited diamond (111) and (100) surfaces

Abstract

High resolution Auger electron spectroscopy was performed on (111) and (100) facets as well as on a microvoid of polycrystalline diamond films. Auger fine structure analyses of these facets indicate anomalous line shapes when electron beam was focused to about 0.2 μm diameter in contrast to the large area scans (beam size 10×8 μm) which exhibit a typical Auger pattern characteristic of diamond. This unusual behavior is discussed in terms of surface reconstruction which may occur due to Auger assisted desorption of hydrogen.